INVESTIGATING SCALING LIMITS OF A FIBER BASED RESONANT PROBE FOR METROLOGY APPLICATIONS

摘要: Currently, Inertial Confinement Fusion (ICF) and High Energy Density Science (HEDS) targets comprise components with dimensions in the millimeter range, while having micrometerscale, high aspect ratio functional features, including fill-tube holes counterbores, slotted patterns, step-joint geometry on hemispherical targets. Representative is shown Figure 1. Future target designs will likely have additional challenging features. The dimensional metrology of these features important for a number reasons, quantifying geometrical tolerances as-built prior to delivery, qualification sub-components assembly, as feedback mechanism fabrication process development. Variations from part can lead limitations, such limited flow rates during filling, unpredictable instabilities an experiment, inability assemble poorly matched sub-components. Adding complexity are large variety materials, components, shapes that render any single technique difficult use low uncertainty. Adapting standing wave probe technology [i] micrometer sized requires understanding physical interaction between oscillating, slender rod (probe) sample means transferring information about surface, topography material properties, analogousmore » tapping mode atomic force microscopy (AFM) and/or instrumented indentation machines. By utilizing variation dynamic response tip interacts may be obtained used mapping surface topography, potentially characterizing properties. novel long enables characterization small holes, slots, corners, which typically cannot accessed using AFM technology. Uncertainty location combination near effects van der Waals electrostatic forces combined contact adhesion meniscus contributions. In addition, environmental effects, thermal gradients air turbulence, influence performance repeatability. A complex nonlinear models tuning fork driver/sensor mechanics, fiber dynamics, circuit interactions been developed current scale system effort predict scaling limitations this nanometer sensitivity.« less