Surface profilometry of high aspect ratio features

摘要: Abstract Three-dimensional surface profilometry of microscale features such as high aspect ratio holes, pins, channels, gears, threads and more complex geometries free form, convex concave shapes remain challenging metrology problems. Existing profilometers are designed to measure easy accessible surfaces with macroscale dimensions, while usually assessed with, SPM, optical methods. Continuous miniaturization increased complexity manufactured components requires new methods that enable co-ordinate well metrology. In this paper a class tactile sensing probe referred standing wave sensor has been for applications. The is 7 μm in diameter 3.5 mm length, incorporated into scanning system capable measuring texture form the same data set. This discusses principle operation presents example obtained from measurements standards, precision thread, 128 μm hole.