HEAT TRANSFER ANALYSIS OF LASER-ASSISTED NANO-IMPRINTING ON A METALLIC SUBSTRATE – TECHNICAL COMMUNICATION

摘要: Laser processing of materials performed on a whole range substrates has been widely investigated in recent years. It is crucial to understand the mechanism and predict how it works various situations or with different materials. The technique laser-assisted nano-imprinting lithography (LAN) proposed literature. In this work, metallic substrate was adopted as instead silicon conventionally used. micro/nano-scaled patterns transferred by LAN process could be further manufactured chemical/electrochemical etching electroforming. Alternatives lead possible versatile applications micro/nano-fabrication. order demonstrate feasibility concept, study employed optical multiple reflection theory perform both analytical numerical modeling during process. copper selected demonstration case thermal respo...