Impact of Sinter Process and Metal Coverage on Transistor Mismatching and Parameter Variations in Analog CMOS Technology
作者： Xiaoju Wu , Joe Trogolo , Flex Inoue , Zhenwu Chen , Pam Jones-Williams
DOI: 10.1109/ICMTS.2007.374457
关键词:
摘要: In this paper, we report detailed studies on the impacts of sinter process and metal coverage CMOS transistor matching parameter variability in an analog technology. Transistor variations with different slotting sizes processed at temperatures have also been studied. It has found that both plating temperature play critical roles variation. Metal degrades VT current (VT offset ~30 mV, DeltaI/I~18% moderate inversion DeltaI/I~3% strong inversion) significantly low temperature. array size 15umX15um 5um separation over demonstrated to be very effective reducing systematic mismatching. The mismatching improves higher Calculated agree well experimental results.
sci-hub.se 参考文章(8)
Anne van den Bosch, Michiel Steyaert, Willy Sansen, An Accurate Statistical Yield Model for CMOS Current-Steering D/A Converters Analog Integrated Circuits and Signal Processing. ,vol. 29, pp. 173- 180 ,(2001) , 10.1023/A:1011261330190
H. Tuinhout, M. Pelgrom, R. Penning de Vries, M. Vertregt, Effects of metal coverage on MOSFET matching international electron devices meeting. pp. 735- 738 ,(1996) , 10.1109/IEDM.1996.554085
K.R. Lakshmikumar, R.A. Hadaway, M.A. Copeland, Characterisation and modeling of mismatch in MOS transistors for precision analog design IEEE Journal of Solid-state Circuits. ,vol. 21, pp. 1057- 1066 ,(1986) , 10.1109/JSSC.1986.1052648
H.P. Tuinhout, M. Vertregt, Test structures for investigation of metal coverage effects on MOSFET matching international conference on microelectronic test structures. pp. 179- 183 ,(1997) , 10.1109/ICMTS.1997.589386
A. Van den Bosch, M. Steyaert, W. Sansen, An accurate statistical yield model for CMOS current-steering D/A converters international symposium on circuits and systems. ,vol. 4, pp. 105- 108 ,(2000) , 10.1109/ISCAS.2000.858699
H.P. Tuinhout, M. Vertregt, Characterization of systematic MOSFET current factor mismatch caused by metal CMP dummy structures IEEE Transactions on Semiconductor Manufacturing. ,vol. 14, pp. 302- 310 ,(2001) , 10.1109/66.964317
M.J.M. Pelgrom, H.P. Tuinhout, M. Vertregt, Transistor matching in analog CMOS applications international electron devices meeting. pp. 915- 918 ,(1998) , 10.1109/IEDM.1998.746503
PA Stolk, HP Tuinhout, Ray Duffy, Emmanuel Augendre, LP Bellefroid, MJB Bolt, Jeroen Croon, CJJ Dachs, FRJ Huisman, AJ Moonen, YV Ponomarev, RFM Roes, Martina Da Rold, E Seevinck, KN Sreerambhatla, Radu Surdeanu, RMDA Velghe, M Vertregt, MN Webster, NKJ Van Winkelhoff, ATA Zegers-Van Duijnhoven, None, CMOS device optimization for mixed-signal technologies international electron devices meeting. ,(2001) , 10.1109/IEDM.2001.979469