作者: Mihaela Miu , Irina Kleps , Teodora Ignat , Monica Simion , Adina Bragaru
DOI: 10.1109/INOW.2008.4634475
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摘要: The study of porous silicon (PS) as optical layer has been used to develop a new (bio)sensor on Si. Moreover, ante- and post-porosification processes improve the PS limitations.