作者: H. Habazaki , M. Uozumi , H. Konno , K. Shimizu , S. Nagata
DOI: 10.1149/1.1940750
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摘要: The influence of tungsten on an amorphous-to-crystalline transition, leading to formation anatase, and dielectric properties is examined for anodic oxides Ti-W alloys. structural change, which occurs at voltagesof ∼10 V high-purity titanium, provides sites generation high-pressure gas oxygen bubbles, suppressed progressively increased voltages by increasing content the film. Phosphorus species, derived from electrolyte, also hinder change. species are located in inner ∼80% film thickness as result faster migration Ti 4 + ions relative that W 6 growing oxide. Although reported permittivity oxide higher than amorphous titania, films alloys decreases gradually with content.