A comparative investigation of thickness measurements of ultra-thin water films by scanning probe techniques

摘要: The reliable operation of micro- and nanomechanical devices necessitates a precise knowledge the water film thickness present on surfaces these with accuracy in nanometer range. In this work, an ultra-thin was measured by distance tunneling spectroscopy dynamic force during desorption ultra-high vacuum system, from about 2.5 nm up to complete at 10−8 mbar. current amplitude vibration normal were detected as function probe-sample distance. experiments, direct comparison both methods possible. It determined that provides most accurate values. previously reported spectroscopy, which requires application significantly high voltages generally leads values are 25 times higher than spectroscopy.