Semiconductor element and method for manufacturing semiconductor element
作者： Tomoaki Kato
DOI:
关键词:
摘要: A semiconductor element is provided with a laminated body (208) which includes constitution wherein clad layer having first conductivity, an active layer, and second conductivity are successively on substrate plane orientation of (001); embedded (209) covers both side planes the body, i.e., parallel to in width direction intersects longitudinal pattern body. part at least one (010) or (100).
lens.org 参考文章(6)
Susumu Kondo, Yoshio Noguchi, Ken Tsuzuki, Masahiro Yuda, Satoshi Oku, Yasuhiro Kondo, Hiroaki Takeuchi, Ruthenium-Doped Semi-Insulating InP-Buried InGaAlAs/InAlAs Multi-Quantum-Well Modulators Japanese Journal of Applied Physics. ,vol. 41, pp. 1171- 1174 ,(2002) , 10.1143/JJAP.41.1171
Inoue Takeshi, Irita Takeshi, Yamaguchi Akira, BURIED TYPE SEMICONDUCTOR LASER AND MANUFACTURE THEREOF ,(1992)
Hirakoso Hideyuki, Ogi Katsumi, Takayama Yoshinori, Okamura Shingo, Sai Atsushi, Yanagisawa Akio, METHOD FOR FEEDING RAW MATERIAL LIQUID INTO RAW MATERIAL VESSEL USED FOR ORGANOMETALLIC CHEMICAL VAPOR DEPOSITION METHOD AND RAW MATERIAL VESSEL FED WITH THE RAW MATERIAL LIQUID ,(2003)
Isao Tsuruma, 功 鶴間, 明 水由, Akira Mizuyoshi, Semiconductor laser and manufacture thereof ,(1999)
Asaga Tatsuya, MANUFACTURE OF SEMICONDUCTOR LASER ,(1989)
Tamura Shuichi, Kurobe Tatsuo, SEMICONDUCTOR LASER DEVICE ,(2003)