Remote plasma apparatus for manufacturing solar cells
作者： Stanford Ovshinsky
DOI:
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摘要: A continuous thin film deposition apparatus that includes a remote plasma source. The source forms from precursor and delivers modified form of the as charge-depleted medium to for formation material. may be formed on web or other moving substrate. within delivered an operatively coupled exits initial is distribution charged species (electrons ions). contains reduced concentration permits materials having lower defect concentration. material solar
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