Method of producing photovoltaic device
作者： Tetsuro Nakamura , Masafumi Sano
DOI:
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摘要: There is disclosed a method of producing photovoltaic device, characterized in that it includes steps of: step forming zinc oxide layer on substrate at least by electrolytic deposition; subjecting the to any one treatment selected from group consisting plasma with rare gas or nitrogen gas, ion irradiation, light irradiation and electromagnetic irradiation; semiconductor are made up non-single crystal silicon material containing hydrogen have p-i-n junction.
google.as 参考文章(17)
Koichiro Moriyama, Shotaro Okabe, Masafumi Sano, Takaharu Kondo, Yuzo Koda, Shuichiro Sugiyama, Ryo Hayashi, Akira Sakai, Silicon film, semiconductor device, and process for forming silicon films ,(2002)
Gary M Didio, Timothy Laarman, Kermit Jones, Kevin Hoffman, Jon Call, Prem Nath, Interfacial plasma bars for photovoltaic deposition apparatus. ,(1992)
Masafumi Sano, Koichi Matsuda, Takaharu Kondo, Makoto Higashikawa, Silicon-based film, formation method therefor and photovoltaic element ,(2002)
Masafumi Sano, Koichi Matsuda, Takaharu Kondo, Makoto Higashikawa, Silicon-based film and photovoltaic element ,(2001)
Yuichi Sonoda, Noboru Toyama, Yusuke Miyamoto, Substrate for solar cell, solar cell having the same, and production process of solar cell ,(2002)
Shotaro Okabe, Masafumi Sano, Shuichiro Sugiyama, Ryo Hayashi, Akira Sakai, Takaharu Kondo, Semiconductor element, and method of forming silicon-based film ,(2002)
Tetsuro Nakamura, Masafumi Sano, Stacked photovoltaic device ,(2003)
Masafumi Sano, Photovoltaic device, process for production thereof, and zinc oxide thin film ,(1998)
Takaharu Kondo, Yukiko Iwasaki, Katsumi Nakagawa, Kozo Arao, Process for production of zinc oxide thin film, and process for production of semiconductor device substrate and process for production of photoelectric conversion device using the same film ,(1997)
Masafumi Sano, Tadashi Hori, Yuzo Koda, Koichi Matsuda, Akira Sakai, Takaharu Kondo, Methods of forming semiconductor element, and semiconductor elements ,(2002)