Development of an Anti-Corrosive Integrated Mass Flow Controller
作者： Kaoru Hirata , Dong-Youn Sim , Masayoshi Esashi
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摘要: The development of an anti-corrosive integrated mass flow controller made by micromachiningis described. Stainless steel (SUS316, SUS316L) was used as a material to prevent corrosion. consists thermal sensor and control valve driven unimorph actuator. could the rate from 0 90 SCCM at 75kPa N2 gas when voltage piezoelectricd isk varied 75V -75V.
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sci-hub.st 参考文章(3)
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