A bakable microvalve with a Kovar - glass - silicon - glass structure
作者： Dong Youn Sim , Toru Kurabayashi , Masayoshi Esashi
DOI: 10.1088/0960-1317/6/2/009
关键词:
摘要: A new bakable pneumatic silicon microvalve has been developed by micromachining for advanced semiconductor device fabrication. This is composed of an anodically bonded glass - structure and it further to a Kovar alloy block which stainless steel tubes. The gas flow rate could be controlled from 0.5 sccm 50 at inlet pressure . can used in the temperature range 25
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