Determination of material properties, such as Young's Modulus, of micro-structures with dimensions less than around 2 mm by deflection of a test element and measurement of a representative value before and during deflection
作者： Josef Hirtreiter , Bernhard Elsner
DOI:
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摘要: Device has a substrate (11) on which bending element (10) of the material under test is mounted, with length (1) less than 2000 micrometers. Bending induced by application set D.C. voltage or DC superimposed high frequency AC voltage. Measurement Young's modulus using an electrode (12) creates capacitance element. The change caused applied can be used to determine properties such as modulus. Alternately electromagnetic wave ultrasonic measurement technique used.
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