Microfabricated metal and oxide fibers for biological applications

作者: J. Gold , B. Nilsson , B. Kasemo

DOI: 10.1116/1.579463

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摘要: Particulates and fibers of ≤10 μm dimensions are important in many human–environment interactions. Two examples asbestos the lung particulate generation from orthopaedic implants. In this article, methods producing made evaporated metal oxide films using microfabrication techniques described. different ‘‘lift‐off’’ discussed detail. Processing allows unprecedented flexibility both choice fiber material as well control over shape dimensions. Monodispersed size distributions obtainable. Fibers silica, titanium, gold have been produced placed into suspensions ready for biological experiments.

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