Arrangement and method for the generation of extreme ultraviolet radiation by means of an electrically operated gas discharge

摘要: The object of an arrangement and a method for generating extreme ultraviolet radiation by electrically operated gas discharge is to improve the adjustment layer thickness and, in particular, prevent uncontrolled accumulation metal be applied rotary electrodes during pauses pulse operation when, e.g., liquid flows through these efficient cooling. In this connection, rotating speed can increased particular until there always freshly coated surface region area at repetition frequencies several kilohertz. An edge on least one electrode has receiving which extends closed circumference along formed so as wetting molten metal. A coating nozzle regenerative application directed shutoff valve connected regulating device.