Electrode in a discharge produced plasma extreme ultraviolet source
作者： Bryan J. Rice
DOI:
关键词: Extreme ultraviolet lithography 、 Plasma 、 Electrode 、 Materials science 、 Radiation 、 Extreme ultraviolet 、 Optics
摘要: An electrode in an extreme ultraviolet (EUV) source of EUV lithography tool. The may be operable to produce a plasma which emits radiation.
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