Low Frequency Noise Characteristics on Al/Nb2O5/p-type Schottky Diode Fabricated by Pulsed DC Magnetron Sputtering
作者： Hyun Gon Oh , Kyung Soo Kim , Jimi Eom , Sang Jik Kwon , Eou Sik Cho
DOI: 10.1080/15421406.2013.853551
关键词:
摘要: Nb2O5films were deposited with pulsed DC magnetron sputter which is versatile and provides the ability to deposit thin film of oxide compounds high deposition rate. Current measurement data from metal-insulator-semiconductor (MIS) structure followed Schottky emission mechanism andreverse current characteristics analyzed oxygen flow rate variation. Low frequency noise measurements have been carried out MIS samples at forward conduction region. The experimental successfully explained by random walk model. effect O2flow process on low has also investigated analyzed.
sci-hub.se 参考文章(23)
X. H. Zhu, E. Defaÿ, A. Suhm, E. Fribourg-blanc, M. Aïd, Ultralow dielectric losses in pyrochlore films of the PbO–MgO–Nb2O5–TiO2 system Applied Physics Letters. ,vol. 94, pp. 122906- ,(2009) , 10.1063/1.3106107
S. Chakraborty, M.K. Bera, S. Bhattacharya, C.K. Maiti, Current conduction mechanism in TiO2 gate dielectrics Microelectronic Engineering. ,vol. 81, pp. 188- 193 ,(2005) , 10.1016/J.MEE.2005.03.005
A I de-Sá, C M Rangel, P Skeldon, G E Thompson, Semiconductive properties of anodic niobium oxides Portugaliae Electrochimica Acta. ,vol. 24, pp. 305- 311 ,(2006) , 10.4152/PEA.200602305
J.I Lee, J Brini, A Chovet, C.A Dimitriadis, On 1/fγ noise in semiconductor devices Solid-State Electronics. ,vol. 43, pp. 2181- 2183 ,(1999) , 10.1016/S0038-1101(99)00186-0
Poopathy Kathirgamanathan, Seenivasagam Ravichandran, Conducting polymer cathodes for high-frequency operable electrolytic niobium capacitors Synthetic Metals. ,vol. 74, pp. 165- 170 ,(1995) , 10.1016/0379-6779(95)03363-7
A.K. Raychaudhuri, Measurement of 1/f noise and its application in materials science Current Opinion in Solid State & Materials Science. ,vol. 6, pp. 67- 85 ,(2002) , 10.1016/S1359-0286(02)00025-6
E.I. Ko, J.G. Weissman, Structures of niobium pentoxide and their implications on chemical behavior Catalysis Today. ,vol. 8, pp. 27- 36 ,(1990) , 10.1016/0920-5861(90)87005-N
Toshiro Maruyama, Susumu Arai, Electrochromic properties of niobium oxide thin films prepared by radio‐frequency magnetron sputtering method Applied Physics Letters. ,vol. 63, pp. 869- 870 ,(1993) , 10.1063/1.109884
A. Tataroğlu, Ş. Altındal, Analysis of interface states and series resistance of MIS Schottky diodes using the current-voltage (I-V) characteristics Microelectronic Engineering. ,vol. 85, pp. 233- 237 ,(2008) , 10.1016/J.MEE.2007.05.043
A. Le Viet, M. V. Reddy, R. Jose, B. V. R. Chowdari, S. Ramakrishna, Nanostructured Nb2O5 Polymorphs by Electrospinning for Rechargeable Lithium Batteries Journal of Physical Chemistry C. ,vol. 114, pp. 664- 671 ,(2010) , 10.1021/JP9088589