PREPARATION OF BaTiO3 FILMS FOR MLCCS BY DIRECT VAPOR DEPOSITION

作者: SANG-SHIK PARK , JAE-HO HA , HAYDN N. WADLEY

DOI: 10.1080/10584580802107809

关键词:

摘要: … To overcome this problem, the dual sources of BaTiO 3 and Ti were used in this study. The … at BaTiO 3 and Ti source were 5, 7, 10 and 20, respectively. As the Ba/Ti ratio increases, the …

参考文章(11)
Hui Huang, Xi Yao, Preparation of BaTiO3 thin films by mist plasma evaporation on MgO buffer layer Ceramics International. ,vol. 30, pp. 1535- 1538 ,(2004) , 10.1016/J.CERAMINT.2003.12.092
J. Yamamatsu, N. Kawano, T. Arashi, A. Sato, Y. Nakano, T. Nomura, Reliability of multilayer ceramic capacitors with nickel electrodes Journal of Power Sources. ,vol. 60, pp. 199- 203 ,(1996) , 10.1016/S0378-7753(96)80011-5
Q.X. Jia, Z.Q. Shi, W.A. Anderson, BaTiO3 thin film capacitors deposited by r.f. magnetron sputtering Thin Solid Films. ,vol. 209, pp. 230- 239 ,(1992) , 10.1016/0040-6090(92)90680-A
Takeshi Nomura, Naoki Kawano, Junko Yamamatsu, Tomohiro Arashi, Yukie Nakano, Akira Sato, Aging Behavior of Ni-Electrode Multilayer Ceramic Capacitors with X7R Characteristics Japanese Journal of Applied Physics. ,vol. 34, pp. 5389- 5395 ,(1995) , 10.1143/JJAP.34.5389
A. E. Feuersanger, A. K. Hagenlocher, A. L. Solomon, Preparation and Properties of Thin Barium Titanate Films Journal of The Electrochemical Society. ,vol. 111, pp. 1387- 1391 ,(1964) , 10.1149/1.2426011
M. Mertin, D. Offenberg, C.W. An, D.A. Wesner, E.W. Kreutz, Pulsed laser deposition of electroceramic thin films Applied Surface Science. pp. 842- 848 ,(1996) , 10.1016/0169-4332(95)00569-2
R.A Zárate, A.L Cabrera, U.G Volkmann, V Fuenzalida, GROWTH STUDIES OF THIN FILMS OF BaTiO3 USING FLASH EVAPORATION Journal of Physics and Chemistry of Solids. ,vol. 59, pp. 1639- 1645 ,(1998) , 10.1016/S0022-3697(98)00008-0
Takashi Chiba, Ken-ichi Itoh, Osamu Matsumoto, Deposition of BaTiO3 Thin-Films by Plasma MOCVD Thin Solid Films. ,vol. 300, pp. 6- 10 ,(1997) , 10.1016/S0040-6090(96)09506-5
Yoshikazu Okino, Hisamitsu Shizuno, Shinya Kusumi, Hiroshi Kishi, Dielectric Properties of Rare-Earth-Oxide-Doped BaTiO3 Ceramics Fired in Reducing Atmosphere Japanese Journal of Applied Physics. ,vol. 33, pp. 5393- 5396 ,(1994) , 10.1143/JJAP.33.5393