Optically balanced, multi-pass displacement interferometry for picometer stability testing

作者: Jo W. Spronck , Robert H.Munnig Schmidt , Justine H. Hatzigeorgopoulos , Jonathan D. Ellis

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摘要: MOTIVATION In precision instruments, unintended motion of components in the instrument can cause significant uncertainty overall measurement. One chief causes these motions is thermal gradients instrument. However, as instruments ever decreasing, another source stability actual materials used construction and connection between materials.

参考文章(2)
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