摘要: Plasma chemistry of heterogeneous systems is still in its infancy. Thus, most the preparative work being done by empirical approach trial and error tailoring materials properties. This requires a large number experimental points to be known multidimensional matrix. The present paper will concentrate on question controlled material design which can achieved with understanding complicated plasma- chemical phenomena under non-thermal conditions far away from thermodynamical equilibrium. A this kind obviously addresses issue non-equilibrium dissipative systems, i. e. domain thermodynamics irreversible processes. master equation for typical plasmachemical system contains many terms insufficiently elementary constants (cross sections) it cannot solved. All problems “solved” some answers “given” questions when using “mathematical modelling”. consists trying find set unknown allow one fit measured curve. Although gain usefull information feeling how an appropriate experiment (e.g.ref./1/), has brought only very limited improvement our taking place given system. Therefore we shall several selected order illustrate general rules govern transformations inorganic systems. Whenever possible discussed as illustration chosen respect their potential applications industry well basic solid state research.
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