Fabrication, Characterization, and Functionalization of Porous Nanocrystalline Silicon Membranes

J.I. Calvo, A. Hernández, G. Caruana, L. Martı́nez, Pore size distributions in microporous membranes. I: Surface study of track-etched filters by image analysis joint international conference on information sciences. ,vol. 175, pp. 138- 150 ,(1995) , 10.1006/JCIS.1995.1439

Brian C. H. Steele, Angelika Heinzel, Materials for fuel-cell technologies Nature. ,vol. 414, pp. 345- 352 ,(2001) , 10.1038/35104620

J. Harrop, R.M. Abdul-Karim, Stresses and deflections in circular plates with square pitch perforations Nuclear Engineering and Design. ,vol. 6, pp. 431- 439 ,(1967) , 10.1016/0029-5493(67)90087-8

C. T. Black, K. W. Guarini, G. Breyta, M. C. Colburn, R. Ruiz, R. L. Sandstrom, E. M. Sikorski, Y. Zhang, Highly porous silicon membrane fabrication using polymer self-assembly Journal of Vacuum Science & Technology B. ,vol. 24, pp. 3188- 3191 ,(2006) , 10.1116/1.2366700

Tristan Pichonat, Bernard Gauthier-Manuel, A new process for the manufacturing of reproducible mesoporous silicon membranes Journal of Membrane Science. ,vol. 280, pp. 494- 500 ,(2006) , 10.1016/J.MEMSCI.2006.02.010

Seung-min Park, Kelvin H. Lee, Harold G. Craighead, On-chip coupling of electrochemical pumps and an SU-8 tip for electrospray ionization mass spectrometry. Biomedical Microdevices. ,vol. 10, pp. 891- 897 ,(2008) , 10.1007/S10544-008-9203-6

D Maier-Schneider, J Maibach, E Obermeier, D Schneider, Variations in Young's modulus and intrinsic stress of LPCVD-polysilicon due to high-temperature annealing Journal of Micromechanics and Microengineering. ,vol. 5, pp. 121- 124 ,(1995) , 10.1088/0960-1317/5/2/016

J. W. Elam, D. Routkevitch, P. P. Mardilovich, S. M. George, Conformal Coating on Ultrahigh-Aspect-Ratio Nanopores of Anodic Alumina by Atomic Layer Deposition Chemistry of Materials. ,vol. 15, pp. 3507- 3517 ,(2003) , 10.1021/CM0303080

E. Ferain, R. Legras, Pore shape control in nanoporous particle track etched membrane Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 174, pp. 116- 122 ,(2001) , 10.1016/S0168-583X(00)00455-9

Rigo Pantoja, John M. Nagarah, Dorine M. Starace, Nicholas A. Melosh, Rikard Blunck, Francisco Bezanilla, James R. Heath, Silicon chip-based patch-clamp electrodes integrated with PDMS microfluidics Biosensors and Bioelectronics. ,vol. 20, pp. 509- 517 ,(2004) , 10.1016/J.BIOS.2004.02.020