Thick stress-free amorphous-tetrahedral carbon films with hardness near that of diamond

作者: T. A. Friedmann , J. P. Sullivan , J. A. Knapp , D. R. Tallant , D. M. Follstaedt

DOI: 10.1063/1.120515

关键词:

摘要: … a-tC layer, which are extracted from the fit of the simulation to the experimental force versus depth response are the yield stress … using the yield stress and elasticity of the layer in a hypo…

参考文章(14)
J. E. Field, The Properties of natural and synthetic diamond Academic Press. ,(1992)
T. A. Friedmann, K. F. McCarty, J. C. Barbour, M. P. Siegal, Dean C. Dibble, Thermal stability of amorphous carbon films grown by pulsed laser deposition Applied Physics Letters. ,vol. 68, pp. 1643- 1645 ,(1996) , 10.1063/1.115891
J.A. Knapp, D.M. Follstaedt, J.C. Barbour, S.M. Myers, Finite-element modeling of nanoindentation for determining the mechanical properties of implanted layers and thin films Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 127, pp. 935- 939 ,(1997) , 10.1016/S0168-583X(97)00034-7
Y. Lifshitz, S. R. Kasi, J. W. Rabalais, Subplantation model for film growth from hyperthermal species: Application to diamond. Physical Review Letters. ,vol. 62, pp. 1290- 1293 ,(1989) , 10.1103/PHYSREVLETT.62.1290
P. J. Fallon, V. S. Veerasamy, C. A. Davis, J. Robertson, G. A. J. Amaratunga, W. I. Milne, J. Koskinen, Properties of filtered-ion-beam-deposited diamondlike carbon as a function of ion energy Physical Review B. ,vol. 48, pp. 4777- 4782 ,(1993) , 10.1103/PHYSREVB.48.4777
J.P Sullivan, T. A. Friedmann, A. G. Baca, Stress relaxation and thermal evolution of film properties in amorphous carbon Journal of Electronic Materials. ,vol. 26, pp. 1021- 1029 ,(1997) , 10.1007/S11664-997-0239-9
George M. Pharr, Daniel L. Callahan, Shaun D. McAdams, Ting Y. Tsui, Simone Anders, André Anders, Joel W. Ager, Ian G. Brown, C. Singh Bhatia, S. R. P. Silva, John Robertson, Hardness, elastic modulus, and structure of very hard carbon films produced by cathodic‐arc deposition with substrate pulse biasing Applied Physics Letters. ,vol. 68, pp. 779- 781 ,(1996) , 10.1063/1.116530
C. B. Collins, F. Davanloo, E. M. Juengerman, W. R. Osborn, D. R. Jander, Laser plasma source of amorphic diamond Applied Physics Letters. ,vol. 54, pp. 216- 218 ,(1989) , 10.1063/1.101013
Mary F. Doerner, William D. Nix, Stresses and deformation processes in thin films on substrates Critical Reviews in Solid State and Materials Sciences. ,vol. 14, pp. 225- 268 ,(1988) , 10.1080/10408438808243734
J. A. Knapp, D. M. Follstaedt, J. C. Barbour, S. M. Myers, J. W. Ager, O. R. Monteiro, I. G. Brown, Evaluating mechanical properties of thin layers using nanoindentation and finite-element modeling: Implanted metals and deposited layers MRS Proceedings. ,vol. 438, pp. 617- ,(1996) , 10.1557/PROC-438-617