Opto-electro-mechanical device or filter, process for making, and sensors made therefrom
作者： David W. Burns , James D. Zook , Henry Guckel
DOI:
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摘要: The present invention relates to microstructures fabricated from semiconductor material and having a flexible member which is excited into various modes of resonance in such read optically. By coupling the microstructure surface or interest, drive means will excite characteristic when optically gives indication certain physical phenomena influencing interest. may be configured self-resonate, as so-called active device, under conditions. Many different quantified using device invention.
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