Thermal Performance of Micro Hotplates with Novel Shapes Based on Single-Layer SiO2 Suspended Film
作者： Qi Liu , Guifu Ding , Yipin Wang , Jinyuan Yao
DOI: 10.3390/MI9100514
关键词:
摘要: In this paper, two kinds of suspended micro hotplate with novel shapes of multibeam structure and reticular structure are designed. These designs have a reliable mechanical strength, …
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