Development of micro-heaters with optimized temperature compensation design for gas sensors.
作者： Woo-Jin Hwang , Kyu-Sik Shin , Ji-Hyoung Roh , Dae-Sung Lee , Sung-Hoon Choa
DOI: 10.3390/S110302580
关键词:
摘要: One of the key components a chemical gas sensor is MEMS micro-heater. Micro-heaters are used in both semiconductor sensors and NDIR sensors; however they each require different heat dissipation characteristics. For sensors, uniform temperature required over wide area heater. On other hand, for sensor, micro-heater needs high levels infrared radiation order to increase sensitivity. In this study, novel design poly-Si proposed improve uniformity on heating plate. Temperature achieved by compensating variation power consumption around perimeter With compensated design, increased 2.5 times average goes up 40 °C. Therefore, suitable sensor. Meanwhile, without compensation shows higher level under equal conditions. This indicates that more Furthermore, short response time less than 20ms, indicating very efficiency pulse driving.
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N.C. Das, M. Jhabvala, D. Robinson, P. Shu, Low power polysilicon sources for IR applications international conference on solid state and integrated circuits technology. pp. 884- 886 ,(1998) , 10.1109/ICSICT.1998.786499
Gwiy-Sang Chung, Fabrication and characterization of micro-heaters with low-power consumption using SOI membrane and trench structures Sensors and Actuators A-physical. ,vol. 112, pp. 55- 60 ,(2004) , 10.1016/J.SNA.2003.10.076
F Mailly, A Giani, R Bonnot, P Temple-Boyer, F Pascal-Delannoy, A Foucaran, A Boyer, Anemometer with hot platinum thin film Sensors and Actuators A-physical. ,vol. 94, pp. 32- 38 ,(2001) , 10.1016/S0924-4247(01)00668-9
Yaowu Mo, Yuzo Okawa, Koji Inoue, Kazuki Natukawa, Low-voltage and low-power optimization of micro-heater and its on-chip drive circuitry for gas sensor array Sensors and Actuators A-physical. ,vol. 100, pp. 94- 101 ,(2002) , 10.1016/S0924-4247(02)00145-0
Yaowu Mo, Yuzo Okawa, Motoshi Tajima, Takehito Nakai, Nobuyuki Yoshiike, Kazuki Natukawa, Micro-machined gas sensor array based on metal film micro-heater Sensors and Actuators B-chemical. ,vol. 79, pp. 175- 181 ,(2001) , 10.1016/S0925-4005(01)00871-1
M. Aslam, C. Gregory, J.V. Hatfield, Polyimide membrane for micro-heated gas sensor array Sensors and Actuators B-chemical. ,vol. 103, pp. 153- 157 ,(2004) , 10.1016/J.SNB.2004.04.102
J.F. Creemer, D. Briand, H.W. Zandbergen, W. van der Vlist, C.R. de Boer, N.F. de Rooij, P.M. Sarro, Microhotplates with TiN heaters Sensors and Actuators A-physical. ,vol. 148, pp. 416- 421 ,(2008) , 10.1016/J.SNA.2008.08.016
J. Spannhake, A. Helwig, G. Müller, G. Faglia, G. Sberveglieri, T. Doll, T. Wassner, M. Eickhoff, SnO2:Sb – A new material for high-temperature MEMS heater applications: Performance and limitations Sensors and Actuators B: Chemical. ,vol. 124, pp. 421- 428 ,(2007) , 10.1016/J.SNB.2007.01.004
Cs. Dücső, I. Bársony, P. Fürjes, Zs. Vizváry, M. Ádám, A. Morrissey, Thermal investigation of micro-filament heaters Sensors and Actuators A-physical. ,vol. 99, pp. 98- 103 ,(2002) , 10.1016/S0924-4247(01)00905-0
E. Cozzani, C. Summonte, L. Belsito, G.C. Cardinali, A. Roncaglia, Design study of micromachined thermal emitters for NDIR gas sensing in the 9-12 μm wavelength range ieee sensors. pp. 181- 184 ,(2007) , 10.1109/ICSENS.2007.4388366