Microhotplates with TiN heaters
作者： J.F. Creemer , D. Briand , H.W. Zandbergen , W. van der Vlist , C.R. de Boer
DOI: 10.1016/J.SNA.2008.08.016
关键词: Chemical vapor deposition 、 Metallurgy 、 Microheater 、 Temperature coefficient 、 Materials science 、 Sputtering 、 Silicon nitride 、 Melting point 、 Tin 、 Titanium nitride
摘要: Titanium nitride (TiN) has been investigated as a heater material for microhotplates and microreactors. TiN is available in many CMOS processes, unlike other microheater materials. In addition, very high melting point (2950 ◦C) meaning that it stable up to higher temperatures than platinum (Pt) polysilicon. For the first time, tested inside conventional membrane of LPCVD silicon (SiN). Two types sputtered are considered: stress low stress. Their performance compared with e-beam evaporated Pt. The maximum average temperature heaters 11% those Pt, reaches over 700 ◦C. Failure due rupture membrane. Pt electro-stress migration. high-stress TiN, coefficient resistance almost constant close making suitable sensing. case low-stress (TCR) becomes nonlinear changes sign. large differences between materials explained by grain structure. different structures related sputtering parameters according Thornton model.
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sci-hub.se 参考文章(41)
Chunbo Zhang, Khalil Najafi, Luis P. Bernal, Peter D. Washabaugh, An Integrated Combustor-Thermoelectric Micro Power Generator Springer Berlin Heidelberg. pp. 34- 37 ,(2001) , 10.1007/978-3-642-59497-7_7
J. W. Gardner, S. M. Lee, P. N. Bartlett, S. Guerin, D. Briand, N. F. de Rooij, Silicon Planar Microcalorimeter Employing Nanostructured Films Transducers '01 - Eurosensors XV 11th Internat. Conf. on Solid-State Sensors and Actuators. ,vol. 1, pp. 820- 823 ,(2001) , 10.1007/978-3-642-59497-7_194
Samuel B. Schaevitz, Aleksander J. Franz, Klavs F. Jensen, Martin A. Schmidt, A Combustion-Based MEMS Thermoelectric Power Generator Springer, Berlin, Heidelberg. pp. 30- 33 ,(2001) , 10.1007/978-3-642-59497-7_6
D. Briand, N. F. de Rooij, A. Odaymat, L. Thiery, Contribution of scanning probe temperature measurements to the thermal analysis of micro-hotplates 10th International Workshop on Thermal Investigation of ICS and Systems. pp. 23- 28 ,(2004)
Roald Michel Tiggelaar, Silicon-technology based microreactors for high-temperature heterogeneous partial oxidation reactions University of Twente. ,(2004)
M. Graf, S. Taschini, P. Kaser, C. Hagleitner, A. Hierlemann, H. Baltes, Digital MOS-transistor-based microhotplate array for simultaneous detection of environmentally relevant gases international conference on micro electro mechanical systems. pp. 351- 354 ,(2004) , 10.1109/MEMS.2004.1290594
J. Laconte, C. Dupont, D. Flandre, J.-P. Raskin, SOI CMOS compatible low-power microheater optimization for the fabrication of smart gas sensors IEEE Sensors Journal. ,vol. 4, pp. 670- 680 ,(2004) , 10.1109/JSEN.2004.833516
Isolde Simon, Nicolae Bârsan, Michael Bauer, Udo Weimar, Micromachined metal oxide gas sensors: opportunities to improve sensor performance Sensors and Actuators B: Chemical. ,vol. 73, pp. 1- 26 ,(2001) , 10.1016/S0925-4005(00)00639-0
D. W. Denlinger, E. N. Abarra, Kimberly Allen, P. W. Rooney, M. T. Messer, S. K. Watson, F. Hellman, Thin film microcalorimeter for heat capacity measurements from 1.5 to 800 K Review of Scientific Instruments. ,vol. 65, pp. 946- 959 ,(1994) , 10.1063/1.1144925
S. Semancik, R.E. Cavicchi, M.C. Wheeler, J.E. Tiffany, G.E. Poirier, R.M. Walton, J.S. Suehle, B. Panchapakesan, D.L. DeVoe, Microhotplate Platforms for Chemical Sensor Research Sensors and Actuators B-chemical. ,vol. 77, pp. 579- 591 ,(2001) , 10.1016/S0925-4005(01)00695-5