Contribution of scanning probe temperature measurements to the thermal analysis of micro-hotplates

摘要: Micro-hotplates are thermal components commonly applied in microsystems such as micromachined semiconductor gas sensors based on metal oxides [1]. Their operating principle is a precise and fast heating up at low power of small thermally isolated area temperatures to 500°C. An accurate knowledge thermo-physical parameters coupled real-operation control procedure required ensure their proper operation future development. However, micro-thermal experiments suffering from lack available techniques. In this paper, we report the extension use micro-thermocouple cantilevered probe perform direct measurements temperature distribution micro-hotplate membranes for extracting adequate quantities input-values finite elements methods (FEM) simulations.