Reliability of freestanding polysilicon microheaters to be used as igniters in solid propellant microthrusters

摘要: Abstract This paper presents the design, fabrication and characterisation of surface micromachined polysilicon microheaters to be used as microigniters for micropropulsion applications. The are heated up by Joule effect thermal losses through substrate minimised suspending above substrate. developed process was compatible with integration nozzle part microthruster. electrical, mechanical characteristics were studied aim evaluating their reliability. Temperatures 470 °C could reached an electrical power 45 mW/beam. current–voltage relation followed a linear characteristic at low power; high bias voltages, drift resistance measured after few I–V cycles higher than 40 mW/beam. elastic plastic deformation threshold in operation maximum deflection before rupture measured. dissipate relatively constant powers minutes hours. fabricated promising candidates ignition solid propellant microthrusters.