Silicon Planar Microcalorimeter Employing Nanostructured Films

摘要: This paper reports upon the combination of a silicon micromachined micro-hotplate with nanostructured catalytic thin film in order to create novel, low-power, microcalorimetric gas sensor. Full 3-D numerical simulations have been carried out and agree well both its observed temperature distribution operating 500°C at power consumption 106 mW. Our experimental work on microcalorimeters electrodeposited nanoporous films suggests that they offer several advantages over classical pellistor devices, such as lower better reproducibility.