In-situ gas blending and dilution system for delivery of dilute gas at a predetermined concentration
作者： Jose I. Arno , James A. Dietz
DOI:
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摘要: Apparatus and method for delivery of dilute active fluid, e.g., to a downstream fluid-consuming process unit semiconductor manufacturing plant. The system includes an fluid source, diluent flow metering device dispensing the at predetermined rate, mixer arranged mix gas from source that is dispensed such rate by device, with form diluted mixture, monitor measure concentration in responsively adjust control maintain mixture.
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