The morphologies and the chemical states of the multiple zincating deposits on Al pads of Si chips
作者： Kwang-Lung Lin , Shiuh-Yuan Chang
DOI: 10.1016/S0040-6090(96)08790-1
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摘要: … The zineating was conducted on the AI pads ( 100 × 100 × 1.5 l.tm 3) of silicon chips. Each chip consists of 400 AI pads. The zincating deposition conducted on the AI pads was a three-…
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