Electromechanical Properties of Microcantilever Actuated by Enhanced Piezoelectric PZT Thick Film
作者： Liu Hong-Mei , Zhao Quan-Liang , Cao Mao-Sheng , Yuan Jie , Duan Zhong-Xia
DOI: 10.1088/0256-307X/25/11/079
关键词:
摘要: Pb(Zr0.53, Ti0.47)O3 (PZT) films with thicknesses of 0.8μm, 2μm and 4μm are prepared by a sol-gel method their longitudinal piezoelectric coefficients analysed. The results show that the PZT thick films, whose density is closer to bulk PZT, has better crystallization, d33 much larger than those thin films. A microcantilever actuated 4-μm-thick film fabricated its displacement measured in different frequencies voltages. increases linearly increasing bias, maximum 0.544 μm observed at 30kHz for 5V bias. resonant frequency obtained experiment matches quite well theoretical result, it shown could be controlled predicated.
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iphy.ac.cn参考文章(16)
Zhang De-Qing, Wang Shao-Jun, Sun Hong-Shan, Wang Xiu-Li, Cao Mao-Sheng, Synthesis and mechanism research of an ethylene glycol-based sol-gel method for preparing PZT nanopowders Journal of Sol-Gel Science and Technology. ,vol. 41, pp. 157- 161 ,(2007) , 10.1007/S10971-006-0521-Y
Jeong Hoon Lee, Kyo Seon Hwang, Jaebum Park, Ki Hyun Yoon, Dae Sung Yoon, Tae Song Kim, Immunoassay of prostate-specific antigen (PSA) using resonant frequency shift of piezoelectric nanomechanical microcantilever Biosensors and Bioelectronics. ,vol. 20, pp. 2157- 2162 ,(2005) , 10.1016/J.BIOS.2004.09.024
T Kobayashi, R Maeda, T Itoh, The influence of DC bias on the displacement and sensor output of self-sensitive piezoelectric microcantilevers Journal of Micromechanics and Microengineering. ,vol. 18, pp. 035025- ,(2008) , 10.1088/0960-1317/18/3/035025
Dongna Shen, Jung-Hyun Park, Jyoti Ajitsaria, Song-Yul Choe, Howard C Wikle, Dong-Joo Kim, The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting Journal of Micromechanics and Microengineering. ,vol. 18, pp. 055017- ,(2008) , 10.1088/0960-1317/18/5/055017
Hai-Bo Lin, Mao-Sheng Cao, Quan-Liang Zhao, Xiao-Ling Shi, Da-Wei Wang, Fu-Chi Wang, Mechanical reinforcement and piezoelectric properties of nanocomposites embedded with ZnO nanowhiskers Scripta Materialia. ,vol. 59, pp. 780- 783 ,(2008) , 10.1016/J.SCRIPTAMAT.2008.06.016
Duan Zhong-Xia, Yuan Jie, Zhao Quan-Liang, Liu Hong-Mei, N Hai-Bo, Zhang Wen-Tong, Cao Mao-Sheng, Preparation and Ferroelectric Properties of Double-Scale PZT Composite Piezoelectric Thick Film Chinese Physics Letters. ,vol. 25, pp. 1472- 1475 ,(2008) , 10.1088/0256-307X/25/4/083
Jian Lu, Yi Zhang, Takeshi Kobayashi, Ryutaro Maeda, Takashi Mihara, Preparation and characterization of wafer scale lead zirconate titanate film for MEMS application Sensors and Actuators A-physical. ,vol. 139, pp. 152- 157 ,(2007) , 10.1016/J.SNA.2006.10.031
Zhao Quan-Liang, Yuan Jie, Liu Hong-Mei, Duan Zhong-Xia, Zhang Wen-Tong, Qiu Cheng-Jun, Cao Mao-Sheng, Stationary Fluid Dynamic Behaviour of V-Shaped Diffuser/Nozzle Elements for Valveless Micropump Chinese Physics Letters. ,vol. 25, pp. 1359- 1361 ,(2008) , 10.1088/0256-307X/25/4/053
Hong Mei Liu, Quan Liang Zhao, Cheng Jun Qiu, Mao Sheng Cao, Fabrication of Piezoelectric Cantilever Beam Based on Nanostructured PZT Film Key Engineering Materials. ,vol. 368-372, pp. 223- 225 ,(2008) , 10.4028/WWW.SCIENTIFIC.NET/KEM.368-372.223
J. H. Park, T. Y. Kwon, D. S. Yoon, H. Kim, T. S. Kim, Fabrication of Microcantilever Sensors Actuated by Piezoelectric Pb(Zr0.52Ti0.48)O3 Thick Films and Determination of Their Electromechanical Characteristics Advanced Functional Materials. ,vol. 15, pp. 2021- 2028 ,(2005) , 10.1002/ADFM.200500331