Quality-enhanced AlN epitaxial films grown on Al substrates by two-step growth
作者： Wenliang Wang , Weijia Yang , Haiyan Wang , Yunnong Zhu , Guoqiang Li
DOI: 10.1039/C5RA19771F
关键词:
摘要: Quality-enhanced AlN epitaxial films have been grown on Al substrates by pulsed laser deposition with two-step growth by the combination of low-temperature and high-temperature growth.
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sci-hub.se 参考文章(33)
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