Thermal stability of AlN films prepared by ion beam assisted deposition

作者: Jian-ping Meng , Xiao-peng Liu , Zhi-qiang Fu , Xiao-jing Wang , Lei Hao

DOI: 10.1016/J.APSUSC.2015.03.120

关键词:

摘要: … by the X-ray photoelectron spectrometer (XPS, PHI Quantera SXM). In … N1s core level spectra of AlN films. For the as-deposited film, only one peak with a binding energy of 396.6 eV …

参考文章(33)
J. W. Lee, I. Radu, M. Alexe, Oxidation behavior of AlN substrate at low temperature Journal of Materials Science: Materials in Electronics. ,vol. 13, pp. 131- 137 ,(2002) , 10.1023/A:1014377132233
H.N. Al-Shareef, X. Chen, D.J. Lichtenwalner, A.I. Kingon, Analysis of the oxidation kinetics and barrier layer properties of ZrN and Pt/Ru thin films for DRAM applications Thin Solid Films. ,vol. 280, pp. 265- 270 ,(1996) , 10.1016/0040-6090(95)08194-1
Laurent Sauques, Sylvain Fagnent, Marie-Christine Sainte Catherine, Claude Sella, Aluminium–aluminium nitride cermet films: preparation by co-sputtering and microstructure Surface & Coatings Technology. ,vol. 102, pp. 25- 34 ,(1998) , 10.1016/S0257-8972(97)00527-6
Paul W. Wang, Jin-Cherng Hsu, Yung-Hsin Lin, Huang-Lu Chen, Nitrogen bonding in aluminum oxynitride films Applied Surface Science. ,vol. 256, pp. 4211- 4214 ,(2010) , 10.1016/J.APSUSC.2010.02.004
A. D. Katnani, K. I. Papathomas, Kinetics and initial stages of oxidation of aluminum nitride: Thermogravimetric analysis and x‐ray photoelectron spectroscopy study Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. ,vol. 5, pp. 1335- 1340 ,(1987) , 10.1116/1.574765
N Duez, B Mutel, O Dessaux, P Goudmand, J Grimblot, AlN formation by direct nitrogen implantation using a DECR plasma Surface and Coatings Technology. ,vol. 125, pp. 79- 83 ,(2000) , 10.1016/S0257-8972(99)00558-7
D. Robinson, R. Dieckmann, Oxidation of aluminium nitride substrates Journal of Materials Science. ,vol. 29, pp. 1949- 1957 ,(1994) , 10.1007/BF00351319
Takayuki Terai, Tomohiro Kobayashi, Takaaki Mitsuyama, Toshiaki Yoneoka, Satoru Tanaka, Fabrication and properties of Al2O3 and AlN coatings for fusion reactor blanket by sputtering method Surface & Coatings Technology. ,vol. 106, pp. 18- 22 ,(1998) , 10.1016/S0257-8972(98)00486-1