作者: Jian-ping Meng , Xiao-peng Liu , Zhi-qiang Fu , Xiao-jing Wang , Lei Hao
DOI: 10.1016/J.APSUSC.2015.03.120
关键词:
摘要: … by the X-ray photoelectron spectrometer (XPS, PHI Quantera SXM). In … N1s core level spectra of AlN films. For the as-deposited film, only one peak with a binding energy of 396.6 eV …