Electrostatic discharge protection for integrated circuit sensor passivation

作者: Danielle A. Thomas , Frank Randolph Bryant

DOI:

关键词:

摘要: A structure and method for creating an integrated circuit passivation (24) comprising, a (16), dielectric (18), metal plates (20) over which insulating layer (26) is disposed that electrically hermetically isolates the discharge (32) deposited to form protects (16) from electrostatic discharges caused by, e.g., finger, disclosed.

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