Design considerations for a practical electrostatic micro-motor

摘要: Abstract Magnetic motors and actuators dominate the large-scale motion domain. For smaller, micro-mechanical systems, electrostatic forces appear more attractive promising than magnetic forces. Despite their distinguished history, have found few practical applications because of high voltages mechanical accuracies traditionally required. This paper explores design utilizing advances in silicon technology. Using wafers, associated insulators, conductors, anisotropic etching fine-line photolithographic techniques, it is possible to develop large fields with moderately (≈100 V) across insulators well-controlled thickness. We present two preliminary designs numerical simulations: one for a linear motor rotary motor.