Ion‐beam sputtered diamond‐like carbon with densities of 2.9 g/cc

摘要: Thin films of carbon have been deposited at temperatures ranging from 77 to 1073 K. It has found that diamond‐like properties the change with deposition temperature and thermal conductivity substrate. Densities as high 2.9 g/cc an sp3 bond content >40% observed. Substrates investigated include graphite, NaCl, Si, Al2O3, fused quartz, diamond. Density measurements made using Rutherford backscattering spectrometry electron‐energy‐loss spectroscopy while hydrogen profiling was conducted forward recoil spectrometry.