Chemical Solution Deposition of Functional Oxide Thin Films
作者： Theodor Schneller , Rainer Waser , Marija Kosec , David Payne , None
DOI: 10.1007/978-3-211-99311-8
关键词:
摘要: Introduction.-Solution Chemistry Simple alkoxide based precursor systems Carboxylate Single-source precursors Acqueos Precursor Systems Solution Synthesis Strategies.-Analytical Methods Introduction Thermal Analysis NMR Sepctroscopy EXAFS Other (XRM, SEM,TEM scattering methods at nanocrystalline films) Spin-Coating Dip Coating Inkjet Printing and Direct Writing Methods(dip point imprint techniques) Chemical Bath Deposition Polymer Assisted Deposition.-Processing Crystallization Thermodynamics Heating Processes Material Dominated by Heterogeneous Nucleation Homogeneous Low Temperature Processing Epitaxial Films Powder Film Fabrication UV-and E-Beam Patterning of Photosensitive CSD Template Controlled Growth.-Functions Applications Integrated Capacitors Base Metal Electrodes Polar Oxide for MEMS Conducting Transparent conducting oxides Superconducting Porous Gas Sensors Luminescent Fims.-Appendix Standard material Systems.
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