Interference optical system, substrate processing apparatus, and measuring method
作者： Tatsuo Matsudo , Kenji Nagai
DOI:
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摘要: The interference optical system includes a light source, collimator, light-receiving element, tunable filter, and calculation apparatus. collimator emits measuring from the source to first main surface of object, receives reflected second surface. element acquires an intensity collimator. filter sweeps wavelength incident element. apparatus measures distribution that has dependence is surface, thickness or temperature object based on waveform obtained by Fourier transforming distribution.
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