Chemical generator with controlled mixing and concentration feedback and adjustment
作者： Richard Linton Samsal , Bruce Herman Greenawald , James Platt Munroe
DOI:
关键词:
摘要: The present invention is an apparatus and process for blending high purity chemicals to produce a chemical mixture with circulation, purification sensing of said between storage use, ultimately on-site use in treating semiconductor materials, such as at fabrication facility that processes silicon wafers.
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