Slurry mixing feeder and slurry mixing and feeding method
作者： Masato Kawasaki , Satoshi Shikami
DOI:
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摘要: A slurry mixing feeder for feeding a to chemical mechanical polishing machine is disclosed. The contains liquids at desired ratio. includes least dispersion of fine abrasive particles and solution an additive. comprises: suction ports sucking the liquids, respectively, number said corresponding that liquids; discharge port machine; feed pumps arranged in lines respective extending from individual port, specific amounts give ratio delivering thus-sucked toward port; dampers pressure-regulated restrictors combination on delivery sides pumps, respectively. method also
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