Surface plasmon polariton model of high-spatial frequency laser-induced periodic surface structure generation in silicon
作者： M Straub , M Afshar , D Feili , H Seidel , K König
DOI: 10.1063/1.4730381
关键词:
摘要: In recent years, high-spatial frequency laser-induced surfaces structures have been generated in a large variety of dielectrics. silicon subwavelength ripples, some which featured periodicities below 100 nm, were formed using ultrafast lasers. We demonstrate for Si(100) that generation dense electron-hole plasma the focal spot ultrashort-pulsed laser light followed by massive excitation waves provides an explanation formation such surface structures. The applied Drude-like model includes carrier-carrier collisions and is excellent agreement with experimentally observed ripple period.
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