作者: Laura Fè , Gerd Norga , Dirk J. Wouters , Ria Nouwen , Lucien C. Van Poucke
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摘要: Although the sol-gel method is ideally suited for preparation of ferroelectric PZT thin films, poor reproducibility and need to lower crystallization temperatures remain an issue. To address these problems, we have studied mechanism film formation using absorption-reflection infrared spectroscopy a novel less harmful precursor solution system based on butoxyethanol. By recording in situ spectra were able monitor hydrolysis, condensation, decomposition phenomena versus temperature. We speculate that reactivity butoxyethanol responsible higher quality Ti rich capacitors prepared by compared with more widely used methoxyethanol one. Finally, observed film's kinetics faster as bulk samples depends thickness electrode layer.