作者: M.H. Korayem , M.S. Sotoudegan , N. Ebrahimi
DOI: 10.1016/J.PRECISIONENG.2013.04.001
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摘要: Abstract Frequency response of an atomic force microscopy cantilever immersed in liquid near a surface strongly depends on the hydrodynamic forces specially squeezed film damping, mechanical properties including dynamic viscosity and density geometrical dimensions cantilever. For slightly inclined magnetically oscillated with approximate acting it, analytical solution equation motion has already been acquired. In this paper, effects resonance frequency, amplitude quality factor are observed then any increase kinematic is studied through simulation oscillatory The acquired amplitude–frequency curves indicate that appropriate proportion between dimensions, it possible to optimize for extremely small tip-sample separations. Also, if thickness increased width reduced cross section area being held constant, will occur at higher frequency be enhanced. Adding glycerol water result reduction due viscous friction damping. Consequently decreased as simulations.