Optimization of Si/sub 1-x/Ge/sub x//Si waveguide photodetectors operating at /spl lambda/=1.3 /spl mu/m
作者： L. Naval , B. Jalali , L. Gomelsky , J.M. Liu
DOI: 10.1109/50.495159
关键词:
摘要: This paper analyzes the influence of various design parameters in external quantum efficiency (QE) waveguide detectors based on Si/Si/sub 1-x/Ge/sub x/ strained-layer superlattices (SLSs), for use optical communications at /spl lambda/=1.3 mu/m. The study presents an algorithm that automatically generates structurally stable SLSs. generation is completed by intensive simulation generated SLSs to calculate QE. embraces waveguiding, absorption, size effect, as well thermodynamics strained layers. Two sets data were created using two different models SiGe layer critical thickness, h/sub c/(x). A conservative model c/, corresponding equilibrium regime, yielded discrete maximum values QE (around 12%) mainly dependent alloy absorption. second metastable produced considerably higher QEs 60%), and shows great importance fiber-to-waveguide coupling efficiency. passive-waveguide coupler geometry investigated beam propagation method.
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