A Compact Primary Gun for Molecular SIMS
作者： Itsuo Katakuse , Toshio Ichihara , Hiromitsu Nakabushi , Takekiyo Matsuo , Hisashi Matsuda
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摘要: A compact primary gun of cold cathode discharge type for molecular SIMS is described. The size the 15 mm diameter and 31 long 5 - 10 μA ion current was obtained. It could be mounted to a conventional FD source without any machine work vaccum chamber.Some spectra obtained with up m/z = 7000 are shown.
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