Recovery, reuse, and recycle of water in semiconductor wafer fabrication facilities
作者： John Degenova , Farhang Shadman
关键词:
摘要: This paper summarizes the benefits and risks associated with water re-use recycling in semiconductor industry. The Specific items that will be covered this are: characterization of spent rinsewater types, composition range key impurities, different strategies, conservation methods. Discussion include development new purification methods for removal organic a computer model simulating effects recycle.
elsevier.com
sci-hub.se 参考文章(0)