Multilayer spiral inductor and integrated circuits incorporating the same

摘要: A multiple layer inductor structure in which the difference phase current between upper and lower spiral segments is reduced so as to thereby obtain not only a significant reduction area but also substantial increase self-resonance frequency concomitant operating range. The incorporates sections, section being disposed on surface of semiconductor substrate dielectric separates respective sections. plurality electrically conductive vias interconnect adjacent concentric loop that flows through element it passes from one sections other alternating these levels number times (i.e., less than or equal segments). Because same direction each mutual inductance has net positive effect total value structure, rather negative effect.