Planar-type inductor and fabrication method thereof

摘要: A planar-type inductor that can restrain the maximum operable frequency from lowering even if inductance part of is miniaturized. This includes an insulating substructure and a patterned conductor layer having predesigned geometric shape formed on chief surface substructure. The contains for providing wanted value first lead second electrically connecting to external circuit located outside inductor. has region adjacent each other at interval. further recess in between part. extends along region. parasitic capacitance reduced due existence recess. Another extending pattern may be formed, instead recess, which reduces electrostatic shielding phenomenon.