Process for the production of accelerometers using silicon on insulator technology
作者： Bernard Diem , Marie-Therese Delaye
DOI:
关键词:
摘要: A process for the production of accelerometers using silicon on insulator method. The comprises following stages: a) producing a conductive monocrystalline film substrate and separated from latter by an insulating layer; b) etching layer up to in order fix shape mobile elements measuring devices; c) electric contacts d) partial elimination free elements, remainder rendering integral moving elements.
lens.org 参考文章(15)
Gilles Delapierre, Process for the production of a piezoresistive gauge and to an accelerometer incorporating such a gauge ,(1987)
Michael Offenberg, Martin Willmann, Method of making an acceleration sensor ,(1992)
H. Seidel, L. Csepregi, A. Heuberger, H. Baumgärtel, Anisotropic Etching of Crystalline Silicon in Alkaline Solutions I . Orientation Dependence and Behavior of Passivation Layers Journal of The Electrochemical Society. ,vol. 137, pp. 3612- 3626 ,(1990) , 10.1149/1.2086277
James C. Erskine, Bernard A. MacIver, Method and product for fabricating a resonant-bridge microaccelerometer ,(1988)
Koichi Murakami, Method of manufacture for semiconductor accelerometer ,(1985)
Mati Mikkor, Silicon accelerometer responsive to three orthogonal force components and method for fabricating Journal of the Acoustical Society of America. ,vol. 90, pp. 1212- 1212 ,(1989) , 10.1121/1.402003
Jean‐Sebastien Danel, Gilles Delapierre, France Michel, Directional accelerometer and its microlithographic fabrication process Journal of the Acoustical Society of America. ,vol. 82, pp. 1859- 1859 ,(1984) , 10.1121/1.395748
Terry V. Roszhart, Silicon micromachined accelerometer Journal of the Acoustical Society of America. ,vol. 90, pp. 623- 623 ,(1988) , 10.1121/1.401229
Burton Boxenhorn, Paul Greiff, Monolithic silicon accelerometer Sensors and Actuators A: Physical. ,vol. 21, pp. 273- 277 ,(1990) , 10.1016/0924-4247(90)85053-7
Shigeo Hoshino, Semiconductor vibration detection device with lever structure Journal of the Acoustical Society of America. ,vol. 80, pp. 1865- 1865 ,(1984) , 10.1121/1.394238